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Inventors
Heejae Byun
Suwon-si
KR
1 patent
2 Patents
US12312185
2025
Tower Lift, Tower Lift Driving Method, and Machine Readable Medium
SEMES CO., Ltd.
0 cites
US11702299
2023
Transport Robot and Substrate Treating Apparatus Comprising the Same
Semes Co., Ltd.
0 cites