Patents/Inventors

Hee Man Ahn

SeoulKR3 patents

4 Patents

US124725962025
Support Unit and Substrate Treating Apparatus Including the Same
SEMES CO., Ltd.
0 cites
US123313992025
Apparatus for Smoothly Exhausting the Atmosphere in a Processing Space When Rotating a Substrate with Liquid
SEMES CO., Ltd.
0 cites
US122288612025
Apparatus for Treating Substrate
SEMES Co., Ltd.
0 cites
US121408682024
Substrate Treating Apparatus with Exhaust Airflow Guide
SEMES CO., Ltd.
0 cites