Patents/Inventors

Hayato Sakai

MiyagiJP3 patents

4 Patents

US125001012025
Temperature Control System and System of Processing Substrate
TOKYO ELECTRON LIMITED
0 cites
US119202422024
Temperature Control Method and Plasma Processing Apparatus
TOKYO ELECTRON LIMITED
0 cites
US118352782023
Temperature Control Medium Processing Apparatus and Temperature Control Medium Processing Method
TOKYO ELECTRON LIMITED
0 cites
US118173342023
Substrate Processing Apparatus and Substrate Processing Method
TOKYO ELECTRON LIMITED
0 cites