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Inventors
Hayato Murata
Ibaraki
JP
3 patents
2 Patents
US12570816
2026
Hydrogen Peroxide Plasma Surface Modification
RASIRC, Inc.
0 cites
US12565699
2026
Device for Supplying a Mixed Gas, Device for Producing Metal Nitride Film, and Method for Producing Metal Nitride Film
TAIYO NIPPON SANSO CORPORATION
0 cites