Patents/Inventors

Haruhiko Furuya

NirasakiJP2 patents

3 Patents

US123476492025
Plasma Processing Apparatus and Lid Member
Tokyo Electron Limited
0 cites
US122058002025
Plasma Processing Apparatus and Plasma Processing Method
Tokyo Electron Limited
0 cites
US121658462024
Plasma Processing Apparatus and Plasma Processing Method
Tokyo Electron Limited
0 cites