Patents/Inventors

Hartmut Rohrmann

SchriesheimDE2 patents

3 Patents

US119526542024
Liquid Sputter Target
EVATEC AG
0 cites
US118481792023
Methods of and Apparatus for Magnetron Sputtering
EVATEC AG
0 cites
US115519502023
Substrate Processing Apparatus and Method of Processing a Substrate and of Manufacturing a Processed Workpiece
EVATEC AG
0 cites