5 Patents
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- US124263872025Atomic Layer-based Surface Treatments for Infrared Detectors
California Institute Of Technology
0 cites - US122179682025Atomic Layer Etching for Smoothing of Arbitrary Surfaces
CALIFORNIA INSTITUTE OF TECHNOLOGY
0 cites - 0 cites
- US118644722024Methods and Systems for Atomic Layer Etching and Atomic Layer Deposition
CALIFORNIA INSTITUTE OF TECHNOLOGY
0 cites