4 Patents
- US122304962025Organoaminosilane Precursors and Methods for Depositing Films Comprising Same
VERSUM MATERIALS US, LLC
0 cites - US117422002023Composition and Methods Using Same for Carbon Doped Silicon Containing Films
VERSUM MATERIALS US, LLC
0 cites - US117251112023Compositions and Processes for Depositing Carbon-doped Silicon-containing Films
Versum Materials US, LLC
0 cites - 0 cites