Hari Sriraman Pathangi

2 Patents

• US116316022023

  Enabling Scanning Electron Microscope Imaging While Preventing Sample Damage on Sensitive Layers Used in Semiconductor Manufacturing Processes

  KLA CORPORATION

  0 cites
• US116004972023

  Using Absolute Z-height Values for Synergy Between Tools

  KLA CORPORATION

  0 cites