Patents/Inventors

Hari Ponnekanti

San Jose, CAUS3 patents

4 Patents

US119487832024
Dynamic Phased Array Plasma Source for Complete Plasma Coverage of a Moving Substrate
APPLIED MATERIALS, Inc.
0 cites
US119231722024
Paired Dynamic Parallel Plate Capacitively Coupled Plasmas
APPLIED MATERIALS, Inc.
0 cites
US117135082023
Apparatus and Methods for Improving Chemical Utilization Rate in Deposition Process
Applied Materials, Inc.
0 cites
US116315832023
RF Power Source Operation in Plasma Enhanced Processes
Applied Materials, Inc.
0 cites