2 Patents
- US116397182023Micromechanical Devices with Mechanical Actuators
Fraunhofer-gesellschaft Zur Foerderung Der Angewandten Forschung E.v.
0 cites - US115549502023MEMS Transducer for Interacting with a Volume Flow of a Fluid, and Method of Producing Same
FRAUNHOFER-GESELLSCHAFT ZUR FÖRDERUNG DER ANGEWANDTEN FORSCHUNG E.V.
0 cites