Patents/Inventors

Haoquan Yan

Fremont, CAUS3 patents

3 Patents

US120875612024
Vacuum Pump Protection Against Deposition Byproduct Buildup
Lam Research Corporation
0 cites
US120274102024
Edge Ring Arrangement with Moveable Edge Rings
Lam Research Corporation
0 cites
US117106232023
Vacuum Pump Protection Against Deposition Byproduct Buildup
Lam Research Corporation
0 cites