6 Patents
- US126107732026Systems and Methods for Metastable Activated Radical Selective Strip and Etch Using Dual Plenum Showerhead
LAM RESEARCH CORPORATION
0 cites - US124513322025Atomic Layer Treatment Process Using Metastable Activated Radical Species
LAM RESEARCH CORPORATION
0 cites - US122725702025Systems and Methods for Metastable Activated Radical Selective Strip and Etch Using Dual Plenum Showerhead
LAM RESEARCH CORPORATION
0 cites - US122725712025Systems and Methods for Metastable Activated Radical Selective Strip and Etch Using Dual Plenum Showerhead
LAM RESEARCH CORPORATION
0 cites - US122117092025Systems and Methods for Metastable Activated Radical Selective Strip and Etch Using Dual Plenum Showerhead
LAM RESEARCH CORPORATION
0 cites - US116949112023Systems and Methods for Metastable Activated Radical Selective Strip and Etch Using Dual Plenum Showerhead
LAM RESEARCH CORPORATION
0 cites