Patents/Inventors

Hans Michael Stiepan

AalenDE6 patents

7 Patents

US124114172025
Projection Objective Including an Optical Device
Carl Zeiss SMT GmbH
0 cites
US124051082025
Production Method and Measurement Method
CARL ZEISS SMT GmbH
0 cites
US123320432025
Measurement Method for Interferometrically Determining a Surface Shape
CARL ZEISS SMT GmbH
0 cites
US122887062025
Parameterizing X-ray Scattering Measurement Using Slice-and-image Tomographic Imaging of Semiconductor Structures
Carl Zeiss SMT GmbH
0 cites
US122350972025
Diffractive Optical Element for a Test Interferometer
CARL ZEISS SMT GmbH
0 cites
US122102892025
Mirror, in Particular for a Microlithographic Projection Exposure Apparatus
CARL ZEISS SMT GmbH
0 cites
US118090852023
Mirror, in Particular for a Microlithographic Projection Exposure Apparatus
CARL ZEISS SMT GmbH
0 cites