Patents/Inventors

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DachauDE2 patents

3 Patents

US124504082025
Machine Learning for Selecting Initial Source Shapes for Source Mask Optimization
Synopsys, Inc.
0 cites
US122491152025
Large Scale Computational Lithography Using Machine Learning Models
Synopsys, Inc.
0 cites
US119143062024
Predicting Defect Rate Based on Lithographic Model Parameters
Synopsys, Inc.
0 cites