Patents/Inventors

Hans Butler

BestNL24 patents

13 Patents

US126035952026
Electromagnetic Motor System, Position Control System, Stage Apparatus, Lithographic Apparatus, Method of Determining a Motor-dependent Commutation Model for an Electromagnetic Motor
ASML Netherlands B.V.
0 cites
US125911792026
Metrology Apparatus
ASML Netherlands B.V.
0 cites
US125463792026
Positioning System, a Lithographic Apparatus, a Driving Force Attenuation Method, and a Device Manufacturing Method
ASML NETHERLANDS B.V.
0 cites
US123065442025
Metrology Tool with Position Control of Projection System
ASML NETHERLANDS B.V.
0 cites
US122102942025
Actuator Assemblies Comprising Piezo Actuators or Electrostrictive Actuators
ASML NETHERLANDS B.V.
0 cites
US121471672024
Imprint Apparatus with Movable Stages
ASML Netherlands B.V.
0 cites
US119407392024
Metrology Apparatus
ASML Netherlands B.V.
0 cites
US119143082024
Lithographic Apparatus
ASML NETHERLANDS B.V.
0 cites
US118801442024
Object Table, a Stage Apparatus and a Lithographic Apparatus
ASML NETHERLANDS B.V.
0 cites
US117893732023
Object Positioning System Diagnostic and Calibration Methods Positioning Control Method Lithographic Apparatus and Device Manufacturing Method
ASML Netherlands B.V.
0 cites
US116095032023
Lithographic Apparatus
ASML Netherlands B.V.
0 cites
US115614792023
Electronic System, Accelerometer, Calibration Method, Lithographic Apparatus and Device Manufacturing Method
ASML Netherlands B.V.
0 cites
US115437562023
Lithographic Apparatus and Method
ASML Netherlands B.V.
0 cites