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Inventors
Hannu Huotari
Helsinki
FI
11 patents
10 Patents
US12463094
2025
Multiple-layer Method and System for Forming Material Within a Gap
ASM IP Holding B.V.
0 cites
US12444599
2025
Method for Forming an Ultraviolet Radiation Responsive Metal Oxide-containing Film
ASM IP Holding B.V.
0 cites
US12272546
2025
Formation of Sioc Thin Films
ASM IP Holding B.V.
0 cites
US12241156
2025
Combination CVD/ALD Method, Source and Pulse Profile Modification
ASM IP Holding B.V.
0 cites
US12138654
2024
Vapor Phase Deposition of Organic Films
ASM IP Holding B.V.
0 cites
US12134108
2024
Vapor Phase Deposition of Organic Films
ASM IP Holding B.V.
0 cites
US11975357
2024
Selective Deposition of Metals, Metal Oxides, and Dielectrics
ASM IP Holding B.V.
0 cites
US11823976
2023
Fluorine-containing Conductive Films
ASM IP Holding, B.V.
0 cites
US11654454
2023
Vapor Phase Deposition of Organic Films
ASM IP HOLDING B.V.
0 cites
US11562900
2023
Formation of Sioc Thin Films
ASM IP HOLDING B.V.
0 cites