Patents/Inventors

Hanhong Chen

Milpitas, CAUS19 patents

15 Patents

US125903632026
Apparatus for Single Chamber Deposition and Etch
Applied Materials, Inc.
0 cites
US125842192026
Methods for Controlling Pulse Shape in ALD Processes
Applied Materials, Inc.
0 cites
US125867642026
Plasma Showerhead Treatment Methods
Applied Materials, Inc.
0 cites
US125801592026
Plasma Showerhead Assembly and Method of Reducing Defects
Applied Materials, Inc.
0 cites
US124697392025
Methods of Operating a Spatial Deposition Tool
Applied Materials, Inc.
0 cites
US124420802025
Plasma Showerhead Assembly and Method of Reducing Defects
Applied Materials, Inc.
0 cites
US123409802025
Plasma Showerhead with Improved Uniformity
Applied Materials, Inc.
0 cites
US123052832025
Dithering or Dynamic Offsets for Improved Uniformity
Applied Materials, Inc.
0 cites
US121192212024
PEALD Nitride Films
Applied Materials, Inc.
0 cites
US120778612024
Dithering or Dynamic Offsets for Improved Uniformity
Applied Materials, Inc.
0 cites
US119553312024
Method of Forming Silicon Nitride Films Using Microwave Plasma
Applied Materials, Inc.
0 cites
US118238702023
PEALD Titanium Nitride with Direct Microwave Plasma
APPLIED MATERIALS, Inc.
0 cites
US117610832023
Methods for Controlling a Flow Pulse Shape
APPLIED MATERIALS, Inc.
0 cites
US116262812023
PEALD Nitride Films
APPLIED MATERIALS, Inc.
0 cites
US115867892023
Machine Learning Based Smart Process Recipe Builder to Improve Azimuthal Flow and Thickness Uniformity
APPLIED MATERIALS, Inc.
0 cites