Patents/Inventors

Han Willem Hendrik Severt

Beek en DonkNL2 patents

3 Patents

US120280002024
Object Table Comprising an Electrostatic Clamp
ASML Netherlands B.V.
0 cites
US119086562024
Stage Apparatus Suitable for a Particle Beam Apparatus
ASML Netherlands B.V.
0 cites
US116375122023
Object Table Comprising an Electrostatic Clamp
ASML Netherlands B.V.
0 cites