Patents/Inventors

Han-kwang Nienhuys

UtrechtNL3 patents

4 Patents

US121641252024
Manufacturing a Reflective Diffraction Grating
ASML NETHERLANDS B.V.
0 cites
US121408752024
Metrology Measurement Method and Apparatus
ASML Netherlands B.V.
0 cites
US119842362024
Radiation System
ASML NETHERLANDS B.V.
0 cites
US118031192023
Contaminant Detection Metrology System, Lithographic Apparatus, and Methods Thereof
ASML Netherlands B.V.
0 cites