3 Patents
- US126046812026Thin Film Deposition Method and Manufacturing Method of Electronic Device Applying the Same
INCHEON NATIONAL UNIVERSITY RESEARCH & BUSINESS FOUNDATION
0 cites - US125403952026Thin Film Deposition Method and Method of Fabricating Electronic Device Using the Same
INCHEON NATIONAL UNIVERSITY RESEARCH & BUSINESS FOUNDATION
0 cites - US124160792025Method and Apparatus for Filling Gap Using Atomic Layer Deposition
INCHEON NATIONAL UNIVERSITY RESEARCH & BUSINESS FOUNDATION
0 cites