Patents/Inventors

Hakki Ergün Cekli

EindhovenNL6 patents

7 Patents

US120789352024
Device Manufacturing Methods
ASML NETHERLANDS B.V.
0 cites
US120455552024
Method to Label Substrates Based on Process Parameters
ASML NETHERLANDS B.V.
0 cites
US118031272023
Method for Determining Root Cause Affecting Yield in a Semiconductor Manufacturing Process
ASML NETHERLANDS B.V.
0 cites
US117823492023
Methods of Determining Corrections for a Patterning Process, Device Manufacturing Method, Control System for a Lithographic Apparatus and Lithographic Apparatus
ASML NETHERLANDS B.V.
0 cites
US117748622023
Method of Obtaining Measurements, Apparatus for Performing a Process Step, and Metrology Apparatus
ASML NETHERLANDS B.V.
0 cites
US117143572023
Method to Predict Yield of a Device Manufacturing Process
ASML NETHERLANDS B.V.
0 cites
US115927532023
Methods of Determining Corrections for a Patterning Process, Device Manufacturing Method, Control System for a Lithographic Apparatus and Lithographic Apparatus
ASML Netherlands B.V.
0 cites