Patents/Inventors

Hajime Tamura

MiyagiJP7 patents

8 Patents

US122939032025
Substrate Support and Plasma Processing Apparatus
Tokyo Electron Limited
0 cites
US122725282025
Stage and Plasma Processing Apparatus
TOKYO ELECTRON LIMITED
0 cites
US121989062025
Substrate Support and Plasma Processing Apparatus
TOKYO ELECTRON LIMITED
0 cites
US121002522024
Passage Propriety Assessment Device, Passage Management System, Passage Propriety Assessment Method, and Computer Program
PANASONIC INTELLECTUAL PROPERTY MANAGEMENT CO., Ltd.
0 cites
US119357292024
Substrate Support and Plasma Processing Apparatus
Tokyo Electron Limited
0 cites
US119086662024
Stage and Plasma Processing Apparatus
TOKYO ELECTRON LIMITED
0 cites
US118548432023
Substrate Stage, Substrate Processing Apparatus, and Temperature Control Method
TOKYO ELECTRON LIMITED
0 cites
US115877692023
Microwave Output Device and Plasma Processing Apparatus
TOKYO KEIKI Inc.
0 cites