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Inventors
Hajime Nakabayashi
Nirasaki
JP
3 patents
3 Patents
US12538504
2026
Film Formation Method
Tokyo Electron Limited
0 cites
US12379653
2025
Pattern Formation Method and Photosensitive Hard Mask
TOKYO ELECTRON LIMITED
0 cites
US11869927
2024
Method of Manufacturing Semiconductor Device
Tokyo Electron Limited
0 cites