Patents/Inventors

Hajime Furutani

Haibara-gunJP4 patents

5 Patents

US119538292024
Actinic Ray-sensitive or Radiation-sensitive Resin Composition, Resist Film, Pattern Forming Method, and Method for Manufacturing Electronic Device
FUJIFILM Corporation
0 cites
US117037582023
Photosensitive Composition for EUV Light, Pattern Forming Method, and Method for Manufacturing Electronic Device
FUJIFILM Corporation
0 cites
US116565482023
Actinic Ray-sensitive or Radiation-sensitive Resin Composition, Resist Film, Pattern Forming Method, Mask Blank with Resist Film, Method for Producing Photomask, and Method for Manufacturing Electronic Device
FUJIFILM Corporation
0 cites
US116401132023
Actinic Ray-sensitive or Radiation-sensitive Resin Composition, Pattern Forming Method, and Method of Manufacturing Electronic Device
FUJIFILM Corporation
0 cites
US116044142023
Photosensitive Composition for EUV Light, Pattern Forming Method, and Method for Manufacturing Electronic Device
FUJIFILM Corporation
0 cites