Patents/Inventors

Hajime Abiko

ToyamaJP5 patents

4 Patents

US125542532026
Substrate Processing Apparatus, Method of Manufacturing Semiconductor Device, and Recording Medium
KOKUSAI ELECTRIC CORPORATION
0 cites
US125471622026
Substrate Processing Apparatus, Switching Method, Method of Manufacturing Semiconductor Device, and Recording Medium
Kokusai Electric Corporation
0 cites
US118760102024
Substrate Processing Apparatus and Recording Medium
KOKUSAI ELECTRIC CORPORATION
0 cites
US118697852024
Method of Manufacturing Semiconductor Device and Non-transitory Computer-readable Recording Medium
Kokusai Electric Corporation
0 cites