Güneş Nakiboǧlu

3 Patents

• US126191652026

  Electrostatic Holder, Object Table and Lithographic Apparatus

  ASML Netherlands B.V.

  0 cites
• US125720782026

  Radiation Source Module and Lithographic Apparatus

  ASML Netherlands B.V.

  0 cites
• US124114242025

  Temperature Conditioning System, a Lithographic Apparatus and a Method of Temperature Conditioning an Object

  ASML NETHERLANDS B.V.

  0 cites