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Inventors
Gyeonghee Lee
Hwaseong-si
KR
2 patents
3 Patents
US12302579
2025
Method for Forming a Three-dimensional Semiconductor Memory Device with an Improved Etching Step
Samsung Electronics Co., Ltd.
0 cites
US12127396
2024
Method of Manufacturing Integrated Circuit Device
SAMSUNG ELECTRONICS CO., Ltd.
0 cites
US11751379
2023
Semiconductor Memory Device
SAMSUNG ELECTRONICS CO., Ltd.
0 cites