Patents/Inventors

Gyanaranjan Pattanaik

Albany, NYUS3 patents

3 Patents

US124826672025
Thermal Etching of Ruthenium
Tokyo Electron Limited
0 cites
US122372162025
Method for Filling Recessed Features in Semiconductor Devices with a Low-resistivity Metal
Tokyo Electron Limited
0 cites
US116211902023
Method for Filling Recessed Features in Semiconductor Devices with a Low-resistivity Metal
Tokyo Electron Limited
0 cites