3 Patents
- US120450092024Digital Holography Microscope (DHM), and Inspection Method and Semiconductor Manufacturing Method Using the DHM
SAMSUNG ELECTRONICS CO., Ltd.
0 cites - US118989122024Hyperspectral Imaging (HSI) Apparatus and Inspection Apparatus Including the Same
SAMSUNG ELECTRONICS CO., Ltd.
0 cites - US117260462023Multi-scale Spectral Imaging Apparatuses and Methods, and Methods of Manufacturing Semiconductor Devices by Using the Imaging Methods
Samsung Electronics Co., Ltd.
0 cites