Patents/Inventors

Gwan-sin Chang

HsinchuTW3 patents

3 Patents

US121838052024
Semiconductor Device and Manufacturing Method Thereof
TAIWAN SEMICONDUCTOR MANUFACTURING CO., Ltd.
0 cites
US121745452024
System and Method for Performing Extreme Ultraviolet Photolithography Processes
Taiwan Semiconductor Manufacturing Co., Ltd.
0 cites
US117684372023
System and Method for Performing Extreme Ultraviolet Photolithography Processes
Taiwan Semiconductor Manufacturing Co., Ltd.
0 cites