Patents/Inventors

Guy Parsey

Ann Arbor, MIUS6 patents

6 Patents

US125796312026
Method to Calibrate, Predict, and Control Stochastic Defects in EUV Lithography
KLA Corporation
0 cites
US125617902026
Method to Calibrate, Predict, and Control Stochastic Defects in EUV Lithography
KLA Corporation
0 cites
US125617912026
Method to Calibrate, Predict, and Control Stochastic Defects in EUV Lithography
KLA Corporation
0 cites
US124061972025
Prediction and Metrology of Stochastic Photoresist Thickness Defects
KLA Corporation
0 cites
US119661562024
Lithography Mask Repair by Simulation of Photoresist Thickness Evolution
KLA Corporation
0 cites
US118686892024
Systems and Methods for Setting Up a Physics-based Model
KLA Corp.
0 cites