Patents/Inventors

Guangqing Chen

Fremont, CAUS4 patents

3 Patents

US125108292025
Method and Apparatus for Design of a Metrology Target
ASML NETHERLANDS B.V.
0 cites
US122048262025
Method and Apparatus for Inspection and Metrology
ASML NETHERLANDS B.V.
0 cites
US115802742023
Method and Apparatus for Inspection and Metrology
ASML NETHERLANDS B.V.
0 cites