7 Patents
- 0 cites
- US123004882025Doped or Undoped Silicon Carbide Deposition and Remote Hydrogen Plasma Exposure for Gapfill
Lam Research Corporation
0 cites - US122278372025Ex Situ Coating of Chamber Components for Semiconductor Processing
Lam Research Corporation
0 cites - US121632192024Ex Situ Coating of Chamber Components for Semiconductor Processing
Lam Research Corporation
0 cites - US118481992023Doped or Undoped Silicon Carbide Deposition and Remote Hydrogen Plasma Exposure for Gapfill
Lam Research Corporation
0 cites - 0 cites
- US117027482023Wafer Level Uniformity Control in Remote Plasma Film Deposition
Lam Research Corporation
0 cites