Patents/Inventors

Gregory Blachut

Campbell, CAUS2 patents

3 Patents

US123728722025
Extreme Ultraviolet (EUV) Lithography Using an Intervening Layer or a Multi-layer Stack with Varying Mean Free Paths for Secondary Electron Generation
LAM RESEARCH CORPORATION
0 cites
US123225882025
Stimulus Responsive Polymer Films and Formulations
Lam Research Corporation
0 cites
US118624732024
Controlled Degradation of a Stimuli-responsive Polymer Film
Lam Research Corporation
0 cites