Patents/Inventors

Gordon Peng

San Jose, CAUS10 patents

3 Patents

US126032572026
Carrier Ring for Floating TCP Chamber Gas Plate
LAM RESEARCH CORPORATION
0 cites
US123946032025
Multizone Gas Distribution Plate for Trench Profile Optimization
LAM RESEARCH CORPORATION
0 cites
US123548952025
Encapsulated RFID in Consumable Chamber Parts
Lam Research Corporation
0 cites