Goon Ho Park

4 Patents

• US120875472024

  Device for Multi-level Pulsing, Substrate Processing Apparatus Including the Same

  SEMES Co. Ltd.

  0 cites
• US120515652024

  Substrate Treating Apparatus and Impedance Matching Method

  SEMES CO., Ltd.

  0 cites
• US118238742023

  Substrate Treating Apparatus and Method for Controlling Temperature of Ferrite Core

  SEMES CO., Ltd.

  0 cites
• US115877702023

  Apparatus and Method for Treating Substrate

  SEMES CO., Ltd.

  0 cites