Patents/Inventors

Goon Heng Wong

Tualatin, ORUS2 patents

2 Patents

US125387472026
Frontside and Backside Pressure Monitoring for Substrate Movement Prevention
Lam Research Corporation
0 cites
US123320422025
In-situ Wafer Thickness and Gap Monitoring Using Through Beam Laser Sensor
Lam Research Corporation
0 cites