6 Patents
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- US119493512024Linear Comb Driver with Non-uniform Fingers for Alignment Stability at Discrete Positions
Lumentum Operations LLC
0 cites - US118926192024MEMS Device with a Three-layer Comb Actuator Structure and a Two-layer Hinge
Lumentum Operations LLC
0 cites - US117263112023Electrode Configuration for Tilting Micro-electro-mechanical Systems Mirror
Lumentum Operations LLC
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