8 Patents
- US126107732026Systems and Methods for Metastable Activated Radical Selective Strip and Etch Using Dual Plenum Showerhead
LAM RESEARCH CORPORATION
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- US123476502025Substrate Processing System Including Dual Ion Filter for Downstream Plasma
LAM RESEARCH CORPORATION
0 cites - US122725712025Systems and Methods for Metastable Activated Radical Selective Strip and Etch Using Dual Plenum Showerhead
LAM RESEARCH CORPORATION
0 cites - US122725702025Systems and Methods for Metastable Activated Radical Selective Strip and Etch Using Dual Plenum Showerhead
LAM RESEARCH CORPORATION
0 cites - US122117092025Systems and Methods for Metastable Activated Radical Selective Strip and Etch Using Dual Plenum Showerhead
LAM RESEARCH CORPORATION
0 cites - US119674862024Substrate Processing System Including Dual Ion Filter for Downstream Plasma
LAM RESEARCH CORPORATION
0 cites - US116949112023Systems and Methods for Metastable Activated Radical Selective Strip and Etch Using Dual Plenum Showerhead
LAM RESEARCH CORPORATION
0 cites