2 Patents
- US122420512025Microelectromechanical Mirror Device with Piezoelectric Actuation and Piezoresistive Sensing Having Self-calibration Properties
Stmicroelectronics S.r.l.
0 cites - US120010122024Piezoelectric Based MEMS Device with Time Sharing Actuation and Sensing Circuitry
Stmicroelectronics Ltd
0 cites