Patents/Inventors

Giampietro Bieli

Santa Clara, CAUS2 patents

3 Patents

US123705812025
In-situ Process Chamber Chuck Cleaning by Cleaning Substrate
KLA Corporation
0 cites
US116389382023
In Situ Process Chamber Chuck Cleaning by Cleaning Substrate
KLA Corporation
0 cites
US116077162023
Systems and Methods for Chuck Cleaning
KLA Corporation
0 cites