Patents/Inventors

Gi Chung Kwon

Seongnam-siKR1 patent

2 Patents

US126159812026
Method for Etching Silicon-containing Film and Semiconductor Device Manufacturing Method Comprising Same
KWANGWOON UNIVERSITY INDUSTRY-ACADEMIC COLLABORATION FOUNDATION
0 cites
US123157102025
Plasma Diagnosis System and Plasma Diagnosis Method
KWANGWOON UNIVERSITY INDUSTRY-ACADEMIC COLLABORATION FOUNDATION
0 cites