3 Patents
- 0 cites
- US121192042024Particle Beam System and the Use Thereof for Flexibly Setting the Current Intensity of Individual Particle Beams
Carl Zeiss Multisem GmbH
0 cites - US115628802023Particle Beam System for Adjusting the Current of Individual Particle Beams
Carl Zeiss Multisem GmbH
0 cites