George Andrew Antonelli

5 Patents

• US124746432025

  System and Method for Performing Alignment and Overlay Measurement Through an Opaque Layer

  Onto Innovation Inc.

  0 cites
• US123851382025

  Plasma-enhanced Deposition of Film Stacks

  Novellus Systems, Inc.

  0 cites
• US118742292024

  Apparatus and Method for Multiple Source Excitation Raman Spectroscopy

  Onto Innovation Inc.

  0 cites
• US118087152023

  Target for Optical Measurement of Trenches

  Onto Innovation Inc.

  0 cites
• US116686442023

  Opto-acoustic Measurement of a Transparent Film Stack

  Onto Innovation Inc.

  0 cites