Patents/Inventors

Gen You

YamanashiJP5 patents

5 Patents

US125753522026
Etching Method and Etching Apparatus
TOKYO ELECTRON LIMITED
0 cites
US122834892025
Etching Method and Etching Apparatus
Tokyo Electron Limited
0 cites
US122725412025
Etching Method and Etching Apparatus
Tokyo Electron Limited
0 cites
US117640702023
Etching Method and Etching Apparatus
Tokyo Electron Limited
0 cites
US115748122023
Computer Storage Medium to Perform a Substrate Treatment Method Using a Block Copolymer Containing a Hydrophilic and Hydrophobic Copolymers
Tokyo Electron Limited
0 cites