Patents/Inventors

Gen Tamamushi

MiyagiJP4 patents

5 Patents

US124760802025
Plasma Processing Apparatus, Power Supply System, Control Method, Program, and Storage Medium
TOKYO ELECTRON LIMITED
0 cites
US121256792024
Plasma Processing Apparatus and Processing Method
TOKYO ELECTRON LIMITED
0 cites
US120875912024
Plasma Processing Apparatus and System
TOKYO ELECTRON LIMITED
0 cites
US120572942024
Plasma Processing Apparatus and Plasma Processing Method
TOKYO ELECTRON LIMITED
0 cites
US119843032024
Holding Method of Edge Ring, Plasma Processing Apparatus, and Substrate Processing System
Tokyo Electron Limited
0 cites