7 Patents
- 0 cites
- US125640122026Ultrathin Conformal Coatings for Electrostatic Dissipation in Semiconductor Process Tools
Applied Materials, Inc.
0 cites - US124865712025Atomic Layer Deposition Coating System for Inner Walls of Gas Lines
APPLIED MATERIALS, Inc.
0 cites - 0 cites
- US120043372024Ultrathin Conformal Coatings for Electrostatic Dissipation in Semiconductor Process Tools
Applied Materials, Inc.
0 cites - 0 cites
- US115470302023Ultrathin Conformal Coatings for Electrostatic Dissipation in Semiconductor Process Tools
APPLIED MATERIALS, Inc.
0 cites