Patents/Inventors

Gary B. Lind

Penn Valley, CAUS3 patents

4 Patents

US122154202025
Pedestal Thermal Profile Tuning Using Multiple Heated Zones and Thermal Voids
Lam Research Corporation
0 cites
USD10576752025
Pedestal for a Substrate Processing System
LAM RESEARCH CORPORATION
0 cites
US121621172024
Pedestal Polishing Apparatus
Lam Research Corporation
0 cites
US117252852023
Preventing Deposition on Pedestal in Semiconductor Substrate Processing
Lam Research Corporation
0 cites