Ganesh Subbuswamy

3 Patents

• US120438962024

  Symmetric Pump Down Mini-volume with Laminar Flow Cavity Gas Injection for High and Low Pressure

  0 cites
• US117215272023

  Processing Chamber Mixing Systems

  Applied Materials, Inc.

  0 cites
• US116742272023

  Symmetric Pump Down Mini-volume with Laminar Flow Cavity Gas Injection for High and Low Pressure

  Applied Materials, Inc.

  0 cites